Breaking limits Using Record enabling Silicon Technology with photonic management - BURST

Karolin Helling, Alexej Haller, Robby Peibst, Jan Krügener (2025): Hybrid dry- and wet-etching process for the preparation of photonic crystals in silicon,  15th International Conference on Crystalline Silicon Photovoltaics (SiliconPV), Oxford, UK, 08. - 11.04.2025