Journal

  • H. Genath, M. A. Schubert, H. L. Yamtomo, J. Krügener, H. J. Osten (2024): Epitaxial Growth of Nd2O3 layers on Virtual SiGe Substrates on Si(111)Journal of Applied Physics 135 (2024) 115302
    DOI: 10.1063/5.0191350
  • K. Gosh, A. Fissl, H. J. Osten, A. R. Chaudhuri (2024): Interference-Modulated Excitonic Reflectance of Monolayer MoSe2 on Epitaxial Gd2O3 Thin FilmsACS Applied Optical Materials 2 (2024) 191
    DOI: 10.1021/acsaom.3c00397
  • A. Nanwani, R. S. Pokharia, J. Schmidt, H. J. Osten, A. Laha, S. Mahapatra (2022): Improvement of crystal quality and surface morphology of Ge/Gd_2 O_3 /Si(111) epitaxial layers by cyclic annealing and regrowthJournal of Physics D: Applied Physics 55 (2022) 115302
    DOI: 10.1088/1361-6463/ac3f0d
  • K. Ghosh, A. Dhara, S. Dhara, A. Fissel, H.-J. Osten, A. R. Chaudhuri (2022): Integration of MoSe2 Monolayers with Epitaxial High-Κ Gd2O3 Substrate: Implication for High-Quality Emission and Modulation of Excitonic QuasiparticlesACS Applied Nano Materials (2022)
    DOI: 10.1021/acsanm.2c01767
  • A. Rawat, K. K. Roluahpuia, P. Gribisch, H.-J. Osten, A. Laha, S. Mahapatra, U. Ganguly (2021): Epitaxial Ge-Gd2O3 on Si(111) substrate by sputtering for germanium-on-insulator applicationsThin Solid Films 731 (2021) 138732
    DOI: 10.1016/j.tsf.2021.138732
  • R. Sarkar, B. B. Upadhyay, S. Bhunia, R. S. Pokharia, D. Nag, S. Surapaneni, J. Lemettinen, S. Suihkonen, P. Gribisch, H.-J. Osten, S. Ganguly, D. Saha, A. Laha (2021): Epi-Gd₂O₃-MOSHEMT: A Potential Solution Toward Leveraging the Application of AlGaN/GaN/Si HEMT With Improved ION/IOFF Operating at 473 KIEEE Transactions on Electron Devices 68 (2021) 2653
    DOI: 10.1109/TED.2021.3070838
  • A. Joseph, G. Lilienkamp, T. F. Wietler, H. J. Osten (2020): Ion-Implanted Epitaxially Grown Gd2O3 on Silicon with Improved Electrical PropertiesJournal of Electronic Materials 49 (2020) 6270
    DOI: 10.1007/s11664-020-08392-4
  • P. Gribisch, A. Fissel (2020): Tuning of structural and dielectric properties of Gd2O3 grown on Si(001)Journal of Applied Physics 128 (2020) 055108
    DOI: 10.1063/5.0007793
  • P. Gribisch, A. Roy Chaudhuri, A. Fissel (2019): Growth and Dielectric Properties of Monoclinic Gd2O3 on Si(001)ECS Transactions 3 (2019) 57
    DOI: 10.1149/09301.0057ecst
  • P. Gribisch, J. Schmidt, H.-J. Osten, A. Fissel (2019): Influence of nanostructure formation on the crystal structure and morphology of epitaxially grown Gd2O3 on Si(001)Acta Crystallographica Section B75 (2019) 59
    DOI: 10.1107/S2052520618017869
  • R. Sarkar, S. Bhunia, D. Nag, B. C. Barik, K. Das Gupta, D. Saha, S. Ganguly, A. Laha, J. Lemettinen, C. Kauppinen, I. Kim, S. Suihkonen, P. Gribisch, H.-J. Osten (2019): Epi-Gd2O3/AlGaN/GaN MOS HEMT on 150 mm Si wafer: A fully epitaxial system for high power applicationApplied Physics Letter 115 (2019) 063502
    DOI: 10.1063/1.5109861
  • A. R. Chaudhuri, A. Fissel, H. J. Osten (2017): Epitaxial lanthanide oxide thin films on Si for high-k gate dielectric application: Growth optimization and defect passivationJournal of Materials Research 32 (2017) 699
    DOI: 10.1557/jmr.2017.22
  • M. Moellers, C. Margenfeld, T. F. Wietler, H. J. Osten (2017): Growth of epitaxially stabilized, non-cubic Gd2O3 on silicon(111) substratesJournal of Crystal Growth 480 (2017) 141
    DOI: 10.1016/j.jcrysgro.2017.10.019
  • A. Joseph, D. Tetzlaff, J. Schmidt, R. Böttger, T. F. Wietler, H. J. Osten (2016): Formation and properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on siliconJournal of Applied Physics 120 (2016) 144103
    DOI: 10.1063/1.4964431
  • H. J. Osten (2016): Epitaxial Oxides on Silicon for CMOS and BeyondECS Transactions 75 (2016) 109
    DOI: 11.1149/07513.0109ecst
  • K. Ghosh, S. Das, A. Fissel, H.J. Osten, A. Laha (2016): Long-Term Stability of Epitaxial (Nd₁₋ₓGdₓ)₂O₃ Thin Films Grown on Si(001) for Future CMOS DevicesIEEE Transactions on Electron Devices 63 (2016) 2852
    DOI: 10.1109/TED.2016.2566681
  • P. Shekhter, D. Schwendt, Y. Amouyal, T. F. Wietler, H. J. Osten, M. Eizenberg (2016): Strain-induced phase variation and dielectric constant enhancement of epitaxial Gd2O3Journal of Applied Physics 120 (2016) 014101
    DOI: 10.1063/1.4958301
  • A. R. Chaudhuri, A. Fissel, and H.-J. Osten (2015): Erratum:“Superior dielectric properties for template assisted grown (100) oriented Gd2O3 thin films on Si (100)”[Appl. Phys. Lett. 104 (2014) 012906]Applied Physics Letters 106 (2015) 149903
    DOI: 10.1063/1.4917251
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2014): Superior dielectric properties for template assisted grown (100) oriented Gd2O3 thin films on Si(100)Applied Physics Letters 104 (2014) 012906
    DOI: 10.1063/1.4861470
  • A. R. Chauhuri, A. Fissel, H.-J. Osten (2014): Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on Siphysica status solidi C 11 (2014) 1412
    DOI: 10.1002/pssc.201300596
  • P. Shekhter, A. R. Chaudhuri, A. Laha, S. Yehezkel, A. Shriki, H.-J. Osten, M. Eizenberg (2014): The influence of carbon doping on the performance of Gd2O3 as high-k gate dielectricApplied Physics Letters 105 (2014) 262901
    DOI: 10.1063/1.4905356
  • A. Laha, A. Fissel, H.-J. Osten (2013): Effective control on flat band voltage of epitaxial lanthanide oxide based MOS capacitors by interfacial carbonApplied Physics Letters 102 (2013) 202902
    DOI: 10.1063/1.4807588
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2013): Investigation of band offsets and dc leakage properties of nitrogen doped epitaxial Gd2O3 thin films on SiJournal of Applied Physics 113 (2013) 184108
    DOI: 10.1063/1.4804245
  • A. R. Chaudhuri, A. Fissel, V. R. Archakam, H.-J. Osten (2013): Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen dopingApplied Physics Letters 102 (2013) 022904
    DOI: 10.1063/1.4775688
  • H.-J. Osten (2013): Crystalline oxides on siliconHigh Permittivity Gate Dielectric Materials, Ed. Samares Kar, Springers Series in Advanced Microelectronics 43 (2013) 395
    ISBN: 978-3-642-36535-5
  • S. Islam, D. Mueller-Sajak, K. R. Hofmann, H. Pfnür (2013): Epitaxial thin films of BaSrO as gate dielectricMicroelectronic Engineering 109 (2013) 152
    DOI: 10.1016/j.mee.2013.03.105
  • D. Müller-Sajak, S. Islam, H. Pfnür, K. R. Hofmann (2012): Temperature stability of ultra-thin mixed BaSr-oxide layers and their transformationNanotechnology 23 (2012) 305202
    DOI: 10.1088/0957-4484/23/30/305202
  • D. Schwendt, H.-J. Osten, P. Shekhter, M. Eizenberg (2012): Strain-induced effects on the dielectric constant for thin, crystalline rare earth oxides on siliconApplied Physics Letters 100 (2012) 232905
    DOI: 10.1063/1.4727893
  • H.-J. Osten, D. Schwendt (2012): Strain Effects on Dielectric Properties of Thin, Crystalline Rare Earth Oxides on SiliconECS Transactions 50 (2012) 41
    DOI: 10.1149/05004.0041ecst
  • A. Laha, A. Bin, P. R. P. Babu, A. Fissel, H.-J. Osten (2011): Enhanced electrical properties of carbon doped epitaxial Gd2O3 thin films on silicon substratesECS Transactions 41 (2011) 101
    DOI: 10.1149/1.3633025
  • A. Laha, B. Ai, P. R. P. Babu, A. Fissel, H.-J. Osten (2011): Impact of carbon incorporation into epitaxial Gd2O3 thin films on silicon: An experimental study on electrical propertiesApplied Physics Letters 99 (2011) 152902
    DOI: 10.1063/1.3646104
  • E. Lipp, Z. Shahar, B. C. Bittel, P. M. Lenahan, D. Schwendt, H.-J. Osten, M. Eizenberg (2011): Trap-assisted conduction in Pt-gated Gd2O3/Si capacitorsJournal of Applied Physics 109 (2011) 073724
    DOI: 10.1063/1.3573036
  • M. F. Beug, G. Tempel, K. R. Hofmann (2011): Gate-Side and Substrate-Side Oxide Trap and Interface State Generation in Conventional and Nitrided Tunnel Oxides of Floating Gate CellsIEEE Transactions Electron Devices 58 (2011) 819
    DOI: 10.1109/TED.2010.2102034
  • Y. Y. Gomeniuk, Y. V. Gomeniuk, A. N. Lazarov, V. S. Lysenko, H.-J. Osten, A. Laha (2011): Interface and bulk properties of high-K gadolinium and neodymium oxides on siliconAdvanced Materials Research 276 (2011) 167
    DOI: 10.4028/www.scientific.net/AMR.276.167
  • A. Cosceev, D. Müller-Sajak, H. Pfnür, K. R. Hofmann (2010): Investigation of the electrical properties of the alkaline-earth oxides BaO, SrO and Ba0.7Sr0.3O on Si(001) as alternative gate dielectricsThin Solid Films 518 (2010) 281
    DOI: 10.1016/j.tsf.2009.10.108
  • A. Fissel, R. Dargis, E. Bugiel, D. Schwendt, T. Wietler, J. Krügener, A. Laha, H.-J. Osten (2010): Single-crystalline Si grown on single-crystalline Gd2O3 by modified solid-phase epitaxyThin Solid Films 518 (2010) 2546
    DOI: 10.1016/j.tsf.2009.09.139
  • A. Laha, A. Fissel, H.-J. Osten (2010): Effect of Ge passivation on interfacial properties of crystalline Gd2O3 thin films grown on Si substratesApplied Physics Letters 96 (2010) 072903
    DOI: 10.1063/1.3318260
  • A. Milanov, K. Xu, A. Laha, E. Bugiel, R. Ranjith, D. Schwendt, H.-J. Osten, H. Parala, R. Fischer, A. Devi (2010): Crystalline Gd2O3 thin films with high quality interface on Si(100) by low temperature H2O assisted atomic layer deposition processJournal of the American Chemical Society 132 (2010) 36
    DOI: 10.1021/ja909102j
  • H.-J. Osten, A. Laha, A. Fissel (2010): Si Nanostructures Embedded into Crystalline Rare Earth Oxide Matrix for Opto and Nano Electronic DevicesProceedings of the 4th International Conference on Quantum, Nano and Micro Technologies (2010) 38
    DOI: 10.1109/ICQNM.2010.14
  • J. X. Wang, T. Liu, Z. Wang, E. Bugiel, A. Laha, T. Watahiki, R. Shayduk, W. Braun, A. Fissel, H.-J. Osten (2010): Epitaxial multi-component rare-earth oxide: A high-k material with ultralow mismatch to SiMaterials Letters 64 (2010) 866
    DOI: 10.1016/j.matlet.2010.01.045
  • R. Dargis, A. Fissel, D. Schwendt, J. Krügener, T. Wietler, A. Laha, E. Bugiel, H.-J. Osten (2010): Epitaxial growth and thermal stability of silicon layers on crystalline rare-earth metal oxidesVacuum 85 (2010) 523
    DOI: 10.1016/j.vacuum.2010.01.026
  • R. Ranjith, A. Laha, E. Bugiel, H.-J. Osten, K. Xu, A. P. Milanov, A. Devi (2010): Downscaling of defect-passivated Gd2O3 thin films on p-Si(001) wafers grown by H2O-assisted atomic layer depositionSemiconductor Science and Technology 25 (2010) 105001
    DOI: 10.1088/0268-1242/25/10/105001
  • A. Fissel, A. Laha, E. Bugiel, R. Dargis, A. Ali, H.J. Osten (2009): Tailoring of Si nanostructures embedded into epitaxial oxides for various applicationsWorld Journal of Engineering 6 (2009) 245
  • A. Laha, E. Bugiel, R. Dargis, D. Schwendt, M. Badylevich, V.V. Afanas’ev, A. Stesmans, A. Fissel, H.-J. Osten (2009): Integration of low dimensional crystalline Si into functional epitaxial oxidesMicroelectronics Journal 40 (2009) 633
    DOI: 10.1016/j.mejo.2008.06.064
  • A. Nazarov, V. Lysenko, Y. Y. Gomeniuk, Y. V. Gomeniuk, H.-J. Osten, A. Laha (2009): Interface and Bulk Properties of MBE-Grown Rare-Earth Metal Oxides on SiliconECS Meeting Abstracts 902 (2009) 2139
    DOI: 10.1149/1.3206634
  • E. Lipp, H.-J. Osten, M. Eizenberg (2009): The thermal stability of Pt/ epitaxial Gd2O3 / Si stacks and its dependence on heat-treatment ambientJournal of Applied Physics 106 (2009) 113505
    DOI: 10.1063/1.3264674
  • H.-J. Osten, A. Fissel, A. Laha (2009): Introducing Crystalline Rare-Earth Oxides into Si-based ElectronicsProceedings of the XVth International Workshop on the Physics of Semiconductor Devices (IWPSD-2009) 107
  • H.-J. Osten, A. Laha, A. Fissel (2009): Epitaxial Lanthanide Oxide based Gate DielectricsMRS Proceedings 1155: CMOS Gate-Stack Scaling — Materials, Interfaces and Reliability Implications (2009) 97
    DOI: 10.1557/PROC-1155-C01-01
  • J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, R. Shayduka, W. Braun, T. M. Liu, H.-J. Osten (2009): Crystal structure and strain state of molecular beam epitaxial grown Gd2O3 on Si(111) substrates: a diffraction studySemiconductor Science and Technology 24 (2009) 045021
    DOI: 10.1088/0268-1242/24/4/045021
  • J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, T. Liu, H.-J. Osten (2009): Structural Study of Epitaxially Grown Nano-thick Nd2O3/Si(111) HeterostructureProceedings of the 4th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS) (2009) 431
    DOI: 10.1109/NEMS.2009.5068613
  • M. C. Lemme, H. D. B. Gottlob, T. J. Echtermeyer, H. Kurz, R. Endres, U. Schwalke, M. Czernohorsky, D. Tetzlaff, H.-J. Osten (2009): Complementary metal oxide semiconductor integration of epitaxial Gd2O3Journal of Vacuum Science & Technology B 27 (2009) 258
    DOI: 10.1116/1.3054350
  • R. Dargis, A. Fissel, E. Bugiel, D. Schwendt, T. Wietler, A. Laha, H.-J. Osten (2009): Epitaxial Growth and Properties of Silicon on Crystalline Rare-Earth-Metal Oxide for SOI ApplicationsMaterial Science (MEDŽIAGOTYRA) 15 (2009) 11
  • R. Dargis, A. Fissel, E. Bugiel, T. Wietler, D. Schwendt, A. Laha, H.-J. Osten (2009): Development of multi-step procedure for epitaxial growth of crystalline silicon on rare-earth-metal oxide for SOI-applicationse-Journal of Surface Science and Nanotechnology 7 (2009) 405
    DOI: 10.1380/ejssnt.2009.405
  • T. F. Wietler, A. Laha, E. Bugiel, M. Czernohorsky, R. Dargis, A. Fissel, H.-J. Osten (2009): Epitaxial growth of Gd2O3 on surfactant-mediated grown Ge films on Si(001) substratesSolid-State Electronics 53 (2009) 833
    DOI: 10.1016/j.sse.2009.04.027
  • V. V. Afanas’ev, M. Badylevich, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2009): Size-dependent interface band alignment between Si nanocrystals and lattice-matched Gd2O3Applied Physics Letters 95 (2209) 102107
    DOI: 10.1063/1.3204019
  • A. Fissel, D. Kühne, E. Bugiel, A. Laha, M. Czernohorsky, R. Dargis, H.-J. Osten (2008): Silicon in functional epitaxial oxides: A new group of nanostructuresMicroelectronics Journal 39 (2008) 512
    DOI: 10.1016/j.mejo.2007.11.007
  • A. Laha, A. Fissel, E. Bugiel, M. Badylevich, V. Afanasiev, H.-J. Osten (2008): Integration of low dimensional crystalline Si into functional epitaxial oxides for next generation solar cell applicationProceedings of the Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) (2008) 148
    DOI: 10.1109/COMMAD.2008.4802118
  • A. Laha, D. Kühne, E. Bugiel, A. Fissel, H.-J. Osten (2008): Embedding silicon nanoclusters into epitaxial rare earth oxide for nonvolatile memory applicationsSemiconductor Science and Technology 23 (2008) 085015
    DOI: 10.1088/0268-1242/23/8/085015
  • A. Laha, E. Bugiel, A. Fissel, H.-J. Osten (2008): Si-nanoclusters embedded into epitaxial rare earth oxides: potential candidate for non-volatile memory applicationsMicroelectronic Engineering 85 (2008) 2350
    DOI: 10.1016/j.mee.2008.09.030
  • A. Laha, E. Bugiel, H.-J. Osten, A. Fissel (2008): Epitaxial Rare Earth Oxide Thin Film: Potential Candidate for Future Microelectronic Devices, Rare Earths: Research and ApplicationsEditor: Keith N. Delfrey, Nova Science Publishers (2008) 301
    ISBN: 978-1-60456-218-7
  • A. Laha, E. Bugiel, J. X. Wang, Q. Q. Sun, A. Fissel, H.-J. Osten (2008): Effect of domain boundaries on the electrical properties of crystalline Gd2O3 thin filmApplied Physics Letters 93 (2008) 182907
    DOI: 10.1063/1.3009206
  • B. Raissi, J. Piscator, O. Engström, S. Hall, O. Buiu, M. C. Lemme, H. D. B. Gottlob, P. K. Hurley, K. Cherkaoui, H.-J. Osten (2008): High-K-oxide/silicon interfaces characterized by capacitance frequency spectroscopySolid-State Electronics 52 (2008) 1274
    DOI: 10.1016/j.sse.2008.04.005
  • E. Lipp, M. Eizenberg, M. Czernohorsky, H.-J. Osten (2008): Effect of oxide structure on the Fermi-level pinning at metal/Gd2O3 interfacesApplied Physics Letters 93 (2008) 193513
    DOI: 10.1063/1.3028071
  • H.-J. Osten, A. Laha, M. Czernohorsky, E. Bugiel, R. Dargis, A. Fissel (2008): Introducing crystalline rare-earth oxides into Si technologiesphysica status solidi A 205 (2008) 695
    DOI: 10.1002/pssa.200723509
  • M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2008): Electronic structure at interfaces of cubic Gd2O3 with embedded Si nanocrystalsMicroelectronic Engineering 85 (2008) 2382
    DOI: 10.1016/j.mee.2008.09.002
  • M. Czernohorsky, D. Tetzlaff, E. Bugiel, R. Dargis, H.-J. Osten, H. D. B. Gottlob, M. Schmidt, M. C. Lemme, H. Kurz (2008): Stability of Crystalline Gd2O3 Thin Films on Silicon during Rapid Thermal AnnealingSemiconductor Science and Technology 23 (2208) 035010
    DOI: 10.1088/0268-1242/23/3/035010
  • Q.-Q. Sun, A. Laha, H.-J. Osten, S.-J. Ding, D. W. Zhang, A. Fissel (2008): Electrical Characterization of Ultrathin Single Crystalline Gd2O3/Si(100) with Pt Top ElectrodeProceedings of the 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008) 1276
    DOI: 10.1109/ICSICT.2008.4734784
  • Q.-Q. Sun, A. Laha, S.-J. Ding, D. W. Zhang, H.-J. Osten, A. Fissel (2008): Observation of near interface oxide traps in single crystalline Nd2O3 on Si(111) by quasistatic C-V methodApplied Physics Letters 93 (2008) 083509
    DOI: 10.1063/1.2976325
  • Q.-Q. Sun, S.-J. Ding, D. W. Zhang, A. Laha, H.-J. Osten, A. Fissel (2008): Effective passivation of slow interface states at the interface of single crystalline Gd2O3 and Si(100)Applied Physics Letters 92 (2008) 152908
    DOI: 10.1063/1.2912523
  • V. V. Afanas’ev, M. Badylevich, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel, W. Tian, L. F. Edge, D. G. Schlom (2008): Band offsets between Si and epitaxial rare earth sesquioxides (RE2O3, RE=La, Nd, Gd, Lu): Effect of 4f-shell occupancyApplied Physics Letters 93 (2008) 192105
    DOI: 10.1063/1.3003872
  • A. Fissel, M. Czernohorsky, R. Dargis, H.-J. Osten (2007): Growth and Properties of Gadolinium Oxide Dielectric Layers on Silicon Carbide for High-K ApplicationMaterial Science Forum 556-557 (2007) 655
    DOI: 10.4028/www.scientific.net/MSF.556-557.655
  • A. Laha, A. Fissel, E. Bugiel, H.-J. Osten (2007): Epitaxial multi-component rare earth oxide for high-K applicationThin Solid Films 515 (2007) 6512
    DOI: 10.1016/j.tsf.2006.11.070
  • A. Laha, A. Fissel, H.-J. Osten (2007): Engineering the interface between epitaxial lanthanide oxide thin films and Si substrates: a route towards tuning the electrical propertiesMicroelectronic Engineering 84 (2007) 2282
    DOI: 10.1016/j.mee.2007.04.051
  • A. Laha, A. Fissel, H.-J. Osten (2007): Influence of interface layer composition on the electrical properties of epitaxial Gd2O3 thin films for high-K applicationApplied Physics Letters 90 (2007) 113508
    DOI: 10.1063/1.2713142
  • A. N. Nazarov, Y. V. Gomeniuk, Y. Y. Gomeniuk, H. D. B. Gottlob, M. Schmidt, M. C. Lemme, M. Czernohorsky, H.-J. Osten (2007): Charge trapping in ultrathin Gd2O3 high-K dielectricsMicroelectronic Engineering 84 (2007) 1968
    DOI: 10.1016/j.mee.2007.04.136
  • E. Bugiel, A. Fissel, M. Czernohorsky, A. Laha, H.-J. Osten (2007): Integration of Functional Epitaxial Oxides into Silicon: A TEM InvestigationMicroscopy and Microanalysis 13 (2007) 304
    DOI: 10.1017/S1431927607081524
  • E. Lipp, M. Eizenberg, M. Czernohorsky, H.-J. Osten (2007): Thermal Stability of Pt/ Epitaxial Gd2O3/ Si StacksMaterials Research Society Symposium Proceedings 996 (2007) H03-08
  • H.-J. Osten, A. Laha, M. Czernohorsky, R. Dargis, E. Bugiel, A. Fissel (2007): Crystalline Rare-Earth Oxides as High-k Materials for Future CMOS TechnologiesECS Transactions 11 (2007) 287
    DOI: 10.1149/1.2779568
  • H.-J. Osten, D. Kühne, A. Laha, M. Czernohorsky, E. Bugiel, A. Fissel (2007): Integration of functional epitaxial oxides into silicon: From high-K application to nanostructuresJournal of Vacuum Science & Technology B 25 (2007) 1039
    DOI: 10.1116/1.2720858
  • H.-J. Osten, E. Bugiel, M. Czernohorsky, Z. Elassar, O. Kirfel, A. Fissel (2007): Molecular Beam Epitaxy of Rare-Earth OxidesIn Topics in Applied Physics Volume 106: Rare Earth Oxide Thin Films, Editors M. Fanciulli & G. Scarel, Springer-Verlag Berlin/Heidelberg (2007) 101
    DOI: 10.1007/11499893_7
    ISBN: 978-3-540-35796-4
  • H.-J. Osten, M. Czernohorsky, R. Dargis, A. Laha, D. Kühne, E. Bugiel, A. Fissel (2007): Integration of functional epitaxial oxides into silicon: From high-K application to nanostructuresMicroelectronic Engineering 84 (2007) 2222
    DOI: 10.1016/j.mee.2007.04.092
  • M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans, A. Laha, H.-J. Osten, A. Fissel (2007): Investigation of the electronic structure at interfaces of crystalline and amorphous Gd2O3 thin layers with silicon substrates of different orientationsApplied Physics Letters 90 (2007) 252101
    DOI: 10.1063/1.2746419
  • A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbideJournal of Vacuum Science & Technology B 24 (2006) 2115
    DOI: 10.1116/1.2214702
  • A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Growth and characterization of crystalline gadolinium oxide on silicon carbide for high-K applicationSuperlattices and Microstructures 40 (2006) 551
    DOI: 10.1016/j.spmi.2006.07.002
  • A. Fissel, Z. Elassar, O. Kirfel, E. Bugiel, M. Czernohorsky, H.-J. Osten (2006): Interface Formation during Molecular beam Epitaxial Growth of Neodymium Oxide on SiliconJournal of Applied Physics 99 (2006) 074105
    DOI: 10.1063/1.2188051
  • A. Laha, A. Fissel, E. Bugiel, H.-J. Osten (2006): Crystalline ternary rare earth oxides with capacitance equivalent thickness below 1 nm for high-K applicationApplied Physics Letters 88 (2006) 172107
    DOI: 10.1063/1.2198518
  • A. Laha, E. Bugiel, H.J. Osten, A. Fissel (2006): Erratum: Crystalline ternary rare earth oxide with capacitance equivalent thickness below 1 nm for high-K application [Applied Physics Letters 88, 172107 (2006)]Applied Physics Letters 89 (2006) 139901
    DOI: 10.1063/1.2354313
  • A. Laha, H.-J. Osten, A. Fissel (2006): Impact of Si substrate orientations on electrical properties of crystalline Gd2O3 thin films for high-K applicationApplied Physics Letters 89 (2006) 143514
    DOI: 10.1063/1.2360209
  • E. Bugiel, H.-J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky (2006): TEM Investigations of Epitaxial High-k Dielectrics on SiliconSpringer Proceedings in Physics 107: Microscopy of Semiconducting Materials, Editors A. G. Cullis & J. L. Hutchinson, Springer-Verlag Berlin Heidelberg (2006) 343
    DOI: 10.1007/3-540-31915-8_73
    ISBN: 978-3-540-31914-6
  • H. D. B. Gottlob, T. Echtermeyer, M. Schmidt, T. Mollenhauer, J. K. Efavi, T. Wahlbrink, M. C. Lemme, M. Czernohorsky, E. Bugiel, A. Fissel, H.-J. Osten, H. Kurz (2006): 0.86 nm CET Gate Stacks with Epitaxial Gd2O3 High-K Dielectrics and FUSI NiSi Metal ElectrodesIEEE Electron Device Letters 27 (2006) 814
    DOI: 10.1109/LED.2006.882581
  • H. D. B. Gottlob, T. Echtermeyer, T. Mollenhauer, J. Efavi, M. Schmidt, T. Wahlbrink, M. C. Lemme, H. Kurz, M. Czernohorsky, E. Bugiel, H.-J. Osten, A. Fissel (2006): CMOS Integration of Epitaxial Gd2O3 High-K Gate DielectricsSolid State Electronics 50 (2006) 979
    DOI: 10.1016/j.sse.2006.04.018
  • H. D. B. Gottlob, T. Echtermeyer, T. Mollenhauer, M. Schmidt, J. K. Efavi, T. Wahlbrink, M. C. Lemme, H. Kurz, R. Endres, Y. Stefanov, U. Schwalke, M. Czernohorsky, E. Bugiel, A. Fissel, H.-J. Osten (2006): Approaches to CMOS integration of epitaxial gadolinium oxide high-K dielectricsProceedings of the 36th European Solid-State Device Research Conference (2006) 150
    DOI: 10.1109/ESSDER.2006.307660
  • H.-J. Osten, A. Fissel, O. Kirfel, Z. Elassar, E. Bugiel, M. Czernohorsky (2006): Interface formation during epitaxial growth of binary metal oxides on siliconNano-Electronic Semiconductor Devices: Defects in High-k Gate Dielectric Stacks, Editor E. Gusev, Springer Netherlands (2006) 361
    DOI: 10.1007/1-4020-4367-8_29
    ISSN: 978-1-4020-4365-9
  • H.-J. Osten, M. Czernohorsky, E. Bugiel, D. Kuehne, A. Fissel (2006): Interface Engineering During Epitaxial Growth of High-K Lanthanide Oxides on SiliconMRS Proceedings 917: Gate Stack Scaling - Materials Selection, Role of Interfaces, and Reliability Implications, Editors: R. Jammy, A. Shanware, V. Misra, Y. Tsunashima, S. DeGendt (2006) 0917-E10-04
    DOI: 10.1557/PROC-0917-E10-04
  • M. Czernohorsky, A. Fissel, E. Bugiel, O.Kirfel, H.-J. Osten (2006): Impact of Oxygen Supply during Growth on the Electrical Properties of Crystalline Gd2O3 Thin Films on Si(001)Applied Physics Letters 88 (2006) 152905
    DOI: 10.1063/1.2194227
  • E. Bugiel, H. J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky (2005): TEM investigations of epitaxial high-k dielectrics on siliconSpringer Proceedings in Physics 107 (2005) 343
    DOI: 10.1007/3-540-31915-8_73
  • M. F. Beug, R. Ferretti, K. R. Hofmann (2005): Polarity dependent generation of gate-side and substrate-side border traps in nitrided gate oxidesMicroelectronic Engineering 80 (2005) 444
    DOI: 10.1016/j.mee.2005.04.104
  • H.J. Osten, J. Dabrowski, H.-J. Müssig, A. Fissel, V. Zavodinsky (2004): High-K dielectrics: the example of Pr2O3, Challenges in Process Simulation(ed.J. Dabrowski and E.R. Weber, Springer Verlag 2004), pp. 259-293
    DOI: 10.1007/978-3-662-09432-7_7
  • A. Fissel, H.J. Osten, E. Bugiel (2003): Towards understanding epitaxial growth of alternative high-k dielectrics on Si(001): Application to praseodymium oxideJournal of Vacuum Science and Technology B 21 (2003) 1765
    DOI: 10.1116/1.1589516
  • H.J. Osten, E. Bugiel, A. Fissel (2003): Epitaxial Praseodymium Oxide: A New High-K DielectricMaterial Research Society Symposium Proceeding 744 (2003) 15
    DOI: 10.1557/PROC-744-M1.5
  • H.J. Osten, E. Bugiel, A. Fissel (2003): Epitaxial praseodymium oxide: a new high-k dielectricSolid-State Electronics 47 (2003) 2165
    DOI: 10.1016/S0038-1101(03)00190-4
  • A. Fissel, J. Dabrowski, H.J. Osten (2002): Photoemission and ab initio theoretical study of interface and film formation during epitaxial growth and annealing of praseodymium oxide on Si(001)Journal of Applied Physics 91 (2002) 8986
    DOI: 10.1063/1.1471943

Konferenzbeitrag

  • U. Singh, H. Genath, R. Sarkar, J. Krügener, H.J. Osten, A. Laha (2023): All Epitaxy Nd2O3/AlGaN/GaN MOSHEMT on semi-insulating (0001) 4H-SiC: Increased thermal stability at 473 K14th International Conference on Nitride Semiconductors (ICNS14), Fukuoka, Japan, 12. - 17.11.2023
  • H. Genath, Y. Barnscheidt, H. J. Osten (2021): Epitaxy of Gd2O3 layers on virtual SiGe substrates on Si(111)German MBE Workshop 2021, online event, 14. - 15.10.2021
  • P. Gribisch, A. Fissel (2019): Tuning of morphology and crystal structure of Gd2O3 grown on Si(001)XXth International Workshop on the Physics of Semiconductor Devices (IWPSD 2019), Kolkata, India, 17.-20.12.2019
  • P. Gribisch, A. R. Chaudhuri, A. Fissel (2019): Growth and dielectric properties of monoclinic Gd2O3 on Si(001)2nd Joint ISTDM / ICSI 2019 Conference, Madison, USA, 02.-06.06.2019
    DOI: 10.1149/09301.0057ecst
  • A. Grimm, J. Ruhkopf, E. Bugiel, T. Wietler (2018): Epitaxial Gd2O3 as surface domain indicator: Towards single domain Ge films grown on Si by surfactant-mediated epitaxyGerman MBE Workshop 2018, Freiburg, Germany, 11.-12.10.2018
  • P. Gribisch, J. Schmidt, H. J. Osten, A. Fissel (2018): Influence of Gd2O3 nanostructure formation on crystal structure and surface morphology during growth on Si(001)German MBE Workshop 2018, Freiburg, Germany, 11.-12.10.2018
  • A. Joseph, D. Tetzlaff, J. Schmidt, R. Böttger, T.F. Wietler, H.J. Osten (2016): Properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on siliconEMN Meeting on Epitaxy, Budapest, Hungary, 04.-08.09.2016
  • A. Joseph, D. Tetzlaff, J. Schmidt, R. Böttger, T.F. Wietler, H.J. Osten (2016): Properties of high-dose nitrogen implanted epitaxially grown Gd2O3 on siliconDeutscher MBE-Workshop, Garching, Germany, 13.-14.10.2016
  • H. Genath, J. Schmidt, D. Tetzlaff, K. Gosh, A. Laha, and H.J. Osten (2016): Epitaxy of Gd2O3 Layers on Virtual GaN SubstratesLNQE Nanoday 2016, Hannover, Germany, 29.09.2016
  • A. R. Chaudhuri (invited) (2015): Tuning dielectric properties of epitaxial Lanthanide oxides on Si by defect passivationMaterials Research Society (MRS) Fall Meeting, Boston, USA, 29.11.-04.12.2015
  • E. Köhnen, J. Krügener, and H.J. Osten (2015): Surface passivation of ion implanted, Al2O3-passivated p+ emittersLNQE Nanoday 2015, Hannover, Germany, 01.10.2015
  • M. Möllers, C. Margenfeld, D. Schwendt, E. Bugiel, T. F. Wietler, and H. J. Osten (2015): Non-cubic Gd2O3 on Silicon (111) SubstratesLNQE Nanoday 2015, Hannover, Germany, 01.10.2015
  • M. Möllers, C. Margenfeld, D. Schwendt, E. Bugiel, T. F. Wietler, and H. J. Osten (2015): Non-cubic Gd2O3 on Silicon (111) SubstratesDeutscher MBE-Workshop, Paderborn, Germany, 21.-22.09.2015
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2014): Template assisted growth and dielectric properties of Gd2O3 thin films on Si(100)E-MRS 2014 Spring Meeting, Lille, France, 26.-30.05.2014
  • C. Margenfeld (2014): Thermally induced phase change of rare earth oxidesDeutscher MBE-Workshop, Darmstadt, Germany, 15.-16.09.2014
  • H.-J. Osten (invited), D. Schwendt, A. R. Chaudhuri, A. Fissel, P. Shekhter, M. Eizenberg (2014): Tuning Dielectric Properties of Epitaxial Lanthanide Oxides on Silicon225th Electrochemical Society Meeting, Orlando, Florida, USA, 11.-15.05.2014
  • K. Ghosh, S. Das, A. Fissel, H.-J. Osten, A. Laha (2014): Long term reliability study of epitaxial neodymium-gadolinium oxides (NGO) on Si substrates for future group IV based CMOS devicesE-MRS 2014 Spring Meeting, Lille, France, 26.-30.05.2014
  • P. Shekhter, A. R. Chaudhuri, A. Laha, S. Yehezkel, A. Shriki, H.-J. Osten, M. Eizenberg (2014): The influence of carbon doping on the electric behavior of Gd2O3 as high-k gate dielectricAVS 61th International Symposium and Exhibition, Baltimore, Maryland, USA, 09.-14.11.2014
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2013): Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on SiE-MRS 2013 Fall Meeting, Warzaw, Poland, 16.-20.09.2013
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2013): Enhanced Dielectric Properties of Nitrogen Doped Epitaxial Gd2O3 Thin Films on SiNanoDay 2013, Hannover, Germany, 10.10.2013
  • A. R. Chaudhuri, A. Fissel, H.-J. Osten (2013): Improving Dielectric Properties of Epitaxial Gd2O3 Thin Films on Si by Dopant Incorporation30th North American Conference on Molecular Beam Epitaxy (NAMBE 2013), Banff, Alberta, Canada, 05.-11.10.2013
  • D. Schwendt, P. Shekhter, M. Eizenberg, H.-J. Osten (2013): Tuning the properties of rare-earth oxides for advanced nano-electronic applicationsFirst Conference of Scientific Cooperation between Lower Saxony and Israel, Hannover, Germany, 06.-07.10.2013
  • H.-J. Osten (invited) (2013): Improving Dielectric Properties of Epitaxial Lanthanide Oxides on SiliconAVS 60th International Symposium and Exhibition, Long Beach, California, USA, 27.10.-01.11.2013
  • D. Schwendt (2012): Spannungseffekte in dünnen, epitaktischen Seltene Erden-OxidenDeutscher MBE-Workshop, Hannover, Germany, 11.-12.09.2012
  • D. Schwendt, H.-J. Osten (2012): Influence of strain on dielectric properties of rare earth oxides17th Workshop on Dielectrics in Microelectronics (WoDiM 2012), Dresden, Germany, 25.-27.06.2012
  • H.-J. Osten (2012): Epitaxial Oxides on Silicon for CMOS and BeyondIndian Institute of Technology Hyderabad, Hyderabad, India, 13.12.2012
  • H.-J. Osten (invited) (2012): Strain-driven enhancement of dielectric properties in thin metal oxides layers epitaxially grown on siliconInternational Conference on Emerging Electronics (ICEE), Mumbai, India, 15.-17.12.2012
  • H.-J. Osten (invited), D. Schwendt (2012): Strain Effects on Dielectric Properties of Thin, Crystalline Rare Earth Oxides on Silicon222th Electrochemical Society Meeting, Honolulu, Hawaii, USA, 07.-12.10.2012
  • A. Grimm, D. Schwendt, H.-J. Osten (2011): Structural investigation of epitaxial high-k gate dielectricsDeutscher MBE-Workshop 2011, Berlin, Germany, 05.-06.10.2011
  • D. Schwendt, H.-J. Osten (2011): Photoelectron spectroscpoy of ultrathin epitaxial rare earth oxides on siliconFrühjahrstagung der Deutschen Physikalischen Gesellschaft, Dresden, Germany, 13.-18.03.2011
  • H.-J. Osten (invited) (2011): Epitaxial Lanthanide Oxides on Silicon for CMOS and Beyond7th International Conference on Si Epitaxy and Heterostructures (ICSI 7), Leuven, Belgium, 28.08.-01.09.2011
  • H.-J. Osten (invited) (2011): Epitaxial Oxides on Silicon for CMOS and Beyond38th Conference on the Physics & Chemistry of Surfaces & Interfaces (PCSI), San Diego, California, USA, 16.-20.01.2011
  • A. Laha, E. Bugiel, H.-J. Osten, A. Fissel, V. V . Afanas’ev, M. Badylevich (2010): Semiconductor Nanostructures in Crystalline Rare Earth Oxide for Nanoelectronic Device Applications22nd International Conference on Microelectronics (ICM2010), 2010, Cairo, Egypt, 19.-22.12.2010
    DOI: 10.1109/ICM.2010.5696129
  • D. Müller-Sajak, H. Pfnür, A. Cosceev, K. R. Hofmann (2010): Crystalline lattice-matched B 0.7Sr0.3O on Si(001) as Gate DielectricElectronic Materials Conference, Notre-Dame, Indiana, USA, 23.-25.06.2010
  • D. Schwendt, E. Bugiel, H.-J. Osten (2010): Tuning the Properties of Crystalline Lanthanide Oxides on SiliconInternational Symposium on Integrated Functionalities (ISIF) 2010, San Juan, Puerto Rico, 13.-16.06.2010
  • H.-J. Osten (invited) (2010): Introducing Crystalline Rare-Earth Oxides into Si-based ElectronicsInternational Symposium on Integrated Functionalities (ISIF) 2010, San Juan, Puerto Rico, 13.-16.06.2010
  • H.-J. Osten, A. Laha, A. Fissel (2010): Si Nanostructures Embedded into Crystalline Rare-Earth Oxide Matrix for Opto and Nano Electronic Applications4th International Conference on Quantum, Nano and Micro Technologies (ICQNM 2010), Sint Maarten, Netherlands Antilles, 10.-16.02.2010
  • R. Endres, H. Gottlob, M. Schmidt, D. Schwendt, H.-J. Osten, U. Schwalke (2010): Crystalline Gadolinium Oxide: A Promising High-k Candidate for Future CMOS Generations218th ECS Meeting, Las Vegas, Nevada, USA, 10.-15.10.2010
  • R. Ranjith, A. Laha, E. Bugiel, H.-J. Osten (2010): Growth and studies of ultra thin Gd2O3 layers and Gd2O3/Si/Gd2O3 stacking on p-Si(111) wafers by molecular beam epitaxy for resonant tunnel diode applications16th International Conference on Molecular Beam Epitaxy (MBE2010), 2010, Berlin, Germany, 22.–27.08.2010
  • A. Fissel, A. Laha, E. Bugiel, R. Dargis, A. Ali, H. J. Osten (2009): Tailoring of Si nanostructures embedded into epitaxial oxides for various applications17th International Conference on Composites/Nano Engineering (ICCE-17), Honolulu, USA, 26.07.-01.08.2009
  • A. Laha, E. Bugiel, A. Fissel, H.-J. Osten (2009): Epitaxial Gd2O3 on strained Si1-xGex layers: Growth and electrical characterizationE-MRS 2009, Symposium I, Strasbourg, France, 08.-12.06.2009
  • A. Laha, M. Jestremski, E. Bugiel, D. Wong, A. Fissel, H.-J. Osten, Ashkar Ali, S. Datta (2009): Si Nanostructures Embedded into Crystalline Rare Earth Oxide Matrix for Opto and Nano-electronic Device Application2009 International Conference on Mechanical and Electronics Engineering (ICMEE), Chennai, India, 27.-29.06.2009
  • A. Laha, M. Jestremski, E. Bugiel, D. Wong, and H.-J. Osten, A. Fissel, A. Ali, S. Datta (2009): Quantum Effects in Group IV Nanostructures Embedded into Crystalline Rare Earth Oxides on Silicon SubstratesInternational Conference on Materials for Advanced Technologies (ICMAT2009), Singapore, 28.06.-03.07.2009
  • A. N. Nazarov, V. S. Lysenko, Y. V.Gomeniuk, Y. Y.Gomeniuk, H.-J. Osten, A. Laha (2009): Interface and bulk properties of MBE-grown rare-earth metal oxides on silicon216th ECS Meeting, Wien, Austria, 04.-09.10.2009
  • D. Müller-Sajak, A. Cosceev, H. Pfnür, K. R. Hofmann (2009): Investigation of Epitaxy and Electrical Properties of the Alkaline-Earth Oxides BaO, SrO and Ba0.7Sr0.3O on Si(001) as Alternative Gate Dielectrics6th International Conference on Silicon Epitaxy and Heterostructures, ICSI-6, Los Angeles, USA, 17.-22.05.2009
  • D. Schwendt, D. Tetzlaff, E. Bugiel, H.-J. Osten (2009): Stability of Crystalline Gd2O3 Thin Films on Silicon during Post-growth Processing3rd International Conference on Signals, Circuits and Systems (SCS’09), Djerba, Tunesia, 06.-08.11.2009
  • H.-J. Osten (invited) (2009): Introducing Crystalline Rare-Earth Oxides into Si-based ElectronicsXVth International Workshop on the Physics of Semiconductor Devices (XVth IWPSD), Delhi, India, 15.-19.12.2009
  • H.-J. Osten (invited) (2009): Epitaxy of High-K Oxides15th Euro-MBE, Zakopane, Poland, 08.-11.03.2009
  • H.-J. Osten, A. Laha, A. Fissel (invited) (2009): Epitaxial Lanthanide Oxide based Gate DielectricsMRS Spring Meeting, San Francisco, California, USA, 13.-17.04.2009
  • J. Wang, A. Laha, A. Fissel, D. Schwendt, R. Dargis, T. Watahiki, T. Liu, H.-J. Osten (2009): Structural Study of Epitaxially Grown Nano-thick Nd2O3/Si(111) Heterostructure4th IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Shenzhen, China, 05.-08.01.2009
  • K. R. Hofmann, A. Cosceev, D. Müller-Sajak, H. Pfnür (2009): Crystalline lattice-matched Ba0.7Sr0.3O on Si(001) as Gate DielectricIEEE Semiconductor Interface Specialists Conference (SISC), Arlington, USA, 03.-05.12.2009
  • R. Dargis, A. Fissel, D. Schwedt, E. Bugiel, J. Krügener, T. Wietler, A. Laha, H.-J. Osten (2009): Epitaxial Growth of Silicon on Rare-Earth Metal oxide4th Symposium on Vacuum based Science and Technology, Koszalin-Kolobrzeg, Poland, 21.-23.09.2009
  • A. Laha, A. Fissel, E. Bugiel, M. Badylevich, V. Afanas'ev, H.-J. Osten (2008): Integration of low dimensional crystalline Si into functional epitaxial oxides for next generation solar cell applicationConference on Optoelectronic and Microelectronic Materials and Devices (COMMAD) 2008, Sydney, Australia, 28.07.-01.08.2008
  • A. Laha, E. Bugiel, A. Fissel, H.-J. Osten (2008): Si-nanoclusters embedded into epitaxial rare earth oxides: potential candidate for non-volatile memory applicationsE-MRS Meeting 2008, Strasbourg, France, 27.-31.05.2008
  • A. Laha, E. Bugiel, R. Dargis, D. Schwendt, M. Badylevich, V. Afanasiev, A. Fissel, H.-J. Osten (2008): Integration of low dimensional crystalline Si into functional epitaxial oxidesWorkshop on Recent Advances of Low Dimensional Structures and Devices (WRA-LDSD) Nottingham, UK, 07.-09.04.2008
  • M. Badylevich, S. Shamuilia, V. V. Afanas’ev, A. Stesmans A. Laha, H.-J. Osten, A. Fissel (2008): Electronic structure of interfaces of cubic Gd2O3 with Si(111) and Si nano-clustersE-MRS Meeting 2008, Strasbourg, France, 27.-31.05.2008
  • M. C. Lemme, H. D. B. Gottlob, T. J. Echtermeyer, H. Kurz, R. Endres, U. Schwalke, M. Czernohorsky, H.-J. Osten (2008): CMOS Integration of Epitaxial Gd2O35th Workshop on Dielectrics in Microelectronics (WoDiM), Bad Saarow, Germany, 23.-25.06.2008
  • Q.-Q. Sun, A. Laha, H.-J. Osten, S.-J. Ding, D. W. Zhang, A. Fissel (2008): Electrical Characterization of Ultrathin Single Crystalline Gd2O3/Si(100) with Pt Top Electrode9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT 2008), Beijing, China, 20.-23.10.2008
  • R. Dargis, A. Fissel, E. Bugiel, T. Wietler, D. Schwendt, A. Laha, H.-J. Osten (2008): Development of multi-step procedure for epitaxial growth of crystalline silicon on rare-earth-metal oxide for SOI-applications14th International Conference on Solid Films and Surfaces (ICSFS), Dublin, 29.06.-04.07.2008
  • T. Wietler, A. Laha, E. Bugiel, M. Czernohorsky, R. Dargis, A. Fissel, H.-J. Osten (2008): Epitaxial growth of Gd2O3 on Ge films grown by surfactant-mediated epitaxy on Si(001) substrates4th International SiGe Technology and Device Meeting (ISTDM 2008), Taiwan, 11.-14.05.2008
  • A. Fissel, D. Kühne, E. Bugiel, A. Laha, M. Czernohorsky, R. Dargis, H.-J. Osten (2007): Silicon in functional epitaxial oxides: A new group of nanostructuresThe 6th International Conference on Low Dimensional Structures and Devices (LDSD), San Andres, Colombia, 15.-20.04.2007
  • A. Laha, A. Fissel, H.-J. Osten (2007): Engineering the interface between epitaxial lanthanide oxide thin films and Si substrates: A route towards tuning the electrical properties15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
  • A. Laha, D. Kühne, E. Bugiel, A. Fissel, H.-J. Osten (2007): Confining single crystal Si-nanoclsuters into epitaxial rare earth oxides: Taking advantage of quantum phenomena to pratical applicationsIUMRS-ICAM, Bangalore, India, 08.-13.10.2007
  • A. N. Nazarov, Y. V. Gomeniuk, Y. Y. Gomeniuk, H. D. B. Gottlob, M. Schmidt, M. C. Lemme, M. Czernohorsky, H.-J. Osten (2007): Charge trapping in ultrathin Gd2O3 high-k dielectric15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
  • B. Raissi, J. Piscator, O. Engström, S. Hall, O. Buiu, M. C. Lemme, H. D. B. Gottlob, P. K. Hurley, K. Cherkaoui, and H.-J. Osten (2007): High-K-oxide/silicon interfaces characterized by capacitance frequency spectroscopy37th European Solid-State Device Research Conference, München, Germany, 11.-13.09.2007
  • E. Bugiel, A. Fissel, M. Czernohorsky, A. Laha, H.-J. Osten (invited) (2007): Integration of Functional Epitaxial Oxides into Silicon: A TEM InvestigationMicroscopy Conference, Saarbrücken, 02.-07.09.2007
  • E. Lipp, M. Eizenberg, M. Czernohorsky, H.-J. Osten (2007): Thermal stability of Pt/Epitaxial Gd2O3/Si StacksMRS Spring Meeting 2007, San Francisco, California, USA, 09.-13.04.2007
  • H.-J. Osten (invited) (2007): Crystalline Rare-Earth Oxides as High-k Materials for Future CMOS Technologies212th ECS Meeting, Washington, D.C., USA, 07.-12.10.2007
  • H.-J. Osten (invited) (2007): From high-K application to nanostructures: Integration of epitaxial gadolinium oxide into silicon5th International Conference on Silicon Epitaxy and Heterostructures (ICSI-5), Marseille, France 20.-24.05.2007
  • H.-J. Osten, D. Kühne, A. Laha, R. Dargis, M. Czernohorsky, E. Bugiel, A. Fissel (invited) (2007): Integration of Functional Epitaxial Oxides into Silicon: From High-K Application to NanostructuresJahrestagung der Deutsche Physikalischen Gesellschaft, Regensburg, Germany, 25.-30.03.2007
  • H.-J. Osten, M. Czernohorsky, R. Dargis, A. Laha, D. Kühne, E. Bugiel, A. Fissel (invited) (2007): Integration of functional epitaxial oxides into silicon: From high-k application to nanostructures15th Conference on Insulating Films on Semiconductors (INFOS), Athens, Greece, 20.-23.06.2007
  • A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Properties of crystalline rare-earth oxide high-k dielectrics grown by molecular beam epitaxy on silicon carbideE-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
  • A. Fissel, M. Czernohorsky, R. Dargis, H.-J. Osten (2006): Growth and Properties of Crystalline Gadolinium Oxide Dielectric Layers On Silicon Carbide for High-K Application6th European Conference on Silicon Carbide and Related Materials (ECSCRM), Newcastle upon Tyne, UK, 03.-07.09.2006
  • A. Laha, A. Fissel, E. Bugiel, H.-J. Osten (2006): Comparative Investigation of Epitaxial Gd2O3 Thin Films Grown on Si Substrates with Different Orientations for High-K Application48th Electronic Materials Conference, Pennsylvania State University, Pennsylvania, USA, 28.-30.06.2006
  • A. Laha, A. Fissel, E. Bugiel, O. Kirfel, H.-J. Osten (2006): Epitaxial multi-component rare earth oxide for high-K applicationE-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
  • H.-J. Osten (invited) (2006): MBE growth and Properties of Crystalline Oxide/Silicon/Oxide NanostructuresESF Exploratory Workshop, Como, Italy, 12.-13.09.2006
  • H.-J. Osten, A. Laha, A. Fissel (2006): Influence of Si substrate orientation on growth and electrical properties of epitaxial Gd2O3 thin films for high-κ application37th IEEE Semiconductor Interface Specialists Conference (SISC), San Diego, 06.-09.12.2006
  • H.-J. Osten, D. Kühne, A. Laha, M. Czernohorsky, E. Bugiel, A. Fissel (2006): Integration of functional epitaxial oxides into silicon: From high-k application to nanostructures24th North American Conference on Molecular Beam Epitaxy, Durham, North Carolina, USA, 08.-11.10.2006
  • H.-J. Osten, M. Czernohorsky, E. Bugiel, D. Kühne, A. Fissel (2006): Interface engineering during epitaxial growth of high-k lanthanide oxides on siliconMRS Spring Meeting 2006, San Francisco, California, USA, 18.-21.04.2006
  • M. Czernohorsky, A. Fissel, H.-J. Osten (2006): Characterization of crystalline rare-earth oxide high-k dielectrics grown by molecular beam epitaxy on silicon carbide33rd Conference on the Physics and Chemistry of Semiconductor Interfaces (PCSI), Cocoa Beach, Florida, USA, 15.-19.01.2006
  • M. Czernohorsky, A. Fissel, R. Dargis, E. Bugiel, H.-J. Osten (2006): Wachstum von kristallinem Gadoliniumoxid auf SiliciumDeutscher MBE Workshop, Hamburg, Germany, 26.-27.09.2006
  • O. Kerker, T. F. Wietler, K. R. Hofmann (2006): Characterization of HfO2 deposited by reactive sputtering as gate dielectric for epitaxial Ge-MOSFETs on Si wafersE-MRS 2006 Spring Meeting, Nice, France, 29.05.-02.06.2006
  • R. Dargis, A. Fissel, M. Czernohorsky, H.-J. Osten (2006): Epitaxie von Gadoliniumoxid auf SiliziumcarbidDeutscher MBE Workshop, Hamburg, Germany, 26.-27.09.2006
  • A. Fissel, O. Kirfel, Z. Elassar, E. Bugiel, M. Czernohorsky, H. J. Osten (2005): Interface formation during epitaxial growth of Neodymium Oxide on Si(001)207th Electrochemical Society Meeting, Quebec (Canada), 15.-20.05.2005
  • E. Bugiel, H.J. Osten, A. Fissel, O. Kirfel, M. Czernohorsky (2005): TEM investigations of Epitaxial High-k Dielectrics on SiliconMicroscopy of Semiconductor Materials (MSM) XIV Conference, Oxford (UK), 11.-14.04.2005
  • H.-J. Osten (2005): Interface formation during epitaxial growth of binary metal oxide on siliconNATO workshop Defects in High-K Materials, St. Petersburg, Russia, 11.-14.07.2005
  • H.-J. Osten (invited) (2005): MBE of rare earth oxidesEuropean Science Foundation, Exploratory Workshop, San Remo, Italy, 11.-13.05.2005
  • H.D.B. Gottlob, T. Echtermeyer, T. Mollenhauer, J. Efavi, M. Schmidt, T. Wahlbrik, M.C. Lemme, H. Kurz, M. Czernohorsky, E. Bugiel, H.J. Osten, O. Kirfel, A. Fissel (2005): Crystalline Gd2O3 High-k Gate Dielectrics with TiN Capped Fully Silicided (FUSI) NiSi Electrodes36th IEEE Semiconductor Interface Specialists Conference (SISC), Arlington (USA), 01.-03.12.2005
  • M. Czernohorsky, O. Kirfel, Z. Elassar, E. Bugiel, A. Fissel, H.-J. Osten (2005): MBE Growth and Interface Formation of Neodymium Oxide on Silicon13th Euro-Konferenz Molecular Beam Epitaxy, Grindelwald, Switzerland, 07.-09.03.2005
  • M. F. Beug, R. Ferretti, K. R. Hofmann (2005): Polarity dependent generation of gate-side and substrate-side border traps in nitrided gate oxidesInsulating Films on Semiconductors, INFOS 2005, Leuven, Belgium, 22.-24.06.2005
  • O. Kerker, J. Zachariae, F. Mirza, R. Ferretti, K. R. Hofmann (2005): Investigation of Electrical and Optical Properties of BaxSr1-xO Gate Oxide MIS StructuresDPG-Frühjahrstagung, Berlin, Germany, 04.-09.03.2005
  • H.-J. Osten, E. Bugiel, A. Fissel, O. Kirfel (invited) (2004): Epitaxial Silicon/Metal Oxide Stacks for various applications11th Advanced Heterostructure Workshop, Hawaii, USA, 05.-10.12.2004
  • A. Fissel, H.-J. Osten, and E. Bugiel (invited) (2003): Towards understanding epitaxial growth of alternative high-K dielectrics on Si(001): Application to Praseodymium OxidePhysics and Chemistry of Semiconductor Interfaces, Salt Lake City, Utah, USA, 19.-23.01.2003
  • F. Beug, R. Ferretti, K. R. Hofmann (2003): Detailed investigation of the transient local tunneling in gate oxides2003 IEEE International Reliability Physics Symposium, Dallas, Texas, USA, 30.03.-04.04.2003
  • H.-J. Osten, A. Bugiel, A. Fissel (invited) (2003): Understanding epitaxial growth of alternative high-K dielectrics on Si(001)ESF Workshop, Zürich, Switzerland, 17.-18.03.2003
  • H.-J. Osten, A. Fissel (invited) (2003): Epitaxial High-K Materials12th EURO-MBE 2002, Bad Hofgastein, Austria, 16.-19.02.2003
  • H.-J. Osten, E. Bugiel, A. Fissel (2002): Epitaxial Praseodymium Oxide: A New High-K Dielectric9th International Workshop on Oxide Electronics (WOE), St. Peter Beach, Florida, Oct. 2002
  • H.-J. Osten, E. Bugiel, A. Fissel (invited) (2002): Epitaxial Praseodymium Oxide: A New High-K DielectricMaterial Research Society, Fall Meeting, Symp. M, Boston, 02.-05.12.2002
  • U. Schwalke, K. Boye, K. Haberle, R. Heller, G. Hess, G. Müller, T. Ruland. G. Tzschöckel, H.-J. Osten, A. Fissel, H. J. Müssig (invited) (2002): Process Integration of Crystalline Pr2O3 High-K Gate Dielectrics32th European Solid-State Device Research Conference (ESSDERC 2002), Firenze, Italy, 24.-26.09.2002