This lecture focuses on special and complex problems encountered during the fabrication of integrated devices and circuits. It builds on the lectures Fundamentals of Semiconductor Elements and Semiconductor Technology, emphasizing the interplay among the different process steps in the manufacturing of integrated circuits.
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_6a00c642b7.jpg)
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_14af70d8d1.jpg)
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_0d2b69f5eb.jpg)
©
MBE 2020
Content
- Trends in electronics
- Manufacturing / Yield / Statistical parameter control / Technology transfer
- Isolation techniques
- Contacts and interconnects (back-end-of-line)
- A CMOS process in detail
- High-K dielectrics
- Basics of epitaxy/strained layers
- Heteroepitaxial devices
- Potential future advancements in electronics
Dates and Materials
Exam dates winter semester 2023/2024
The exam will take place online this semester on 28.03.2024 from 16:15 in the E-Prüfungsilias (https://epruefungen.uni-hannover.de). The access data will be provided to all registered students shortly before the exam.
In order to take the exam, you must register for it online at the Examinations Office. Please note the registration period, which is binding for your course of study. Subsequent registrations are not possible.
Contact Us
Lecture
Dr.-Ing. Jan Krügener
Research Staff
chief engineer
chief engineer
Phone
Fax
Address
Schneiderberg 32
30167 Hannover
30167 Hannover
Building
Room
Practical
Hannah Naomi Genath, M. Sc.
Research Staff
