This lecture focuses on special and complex problems encountered during the fabrication of integrated devices and circuits. It builds on the lectures Fundamentals of Semiconductor Elements and Semiconductor Technology, emphasizing the interplay among the different process steps in the manufacturing of integrated circuits.
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_6a00c642b7.jpg)
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_14af70d8d1.jpg)
![[Translate to English:] TEM Querschnittsaufnahme eines integrierten Schaltkreises inklusive Back-End-Of-Line](https://www.mbe.uni-hannover.de/fileadmin/_processed_/e/0/csm_TIB_0d2b69f5eb.jpg)
©
MBE 2020
Content
- Trends in electronics
- Manufacturing / Yield / Statistical parameter control / Technology transfer
- Isolation techniques
- Contacts and interconnects (back-end-of-line)
- A CMOS process in detail
- High-K dielectrics
- Basics of epitaxy/strained layers
- Heteroepitaxial devices
- Potential future advancements in electronics
Dates and Materials
Contact Us
Lecture
Dr.-Ing. Jan Krügener
Research Staff
chief engineer
chief engineer
Phone
Fax
Address
Schneiderberg 32
30167 Hannover
30167 Hannover
Building
Room
Practical
Dr.-Ing. Hannah Naomi Genath
Research Staff
