Semiconductor Technology (Winter semester 2023/2024)

This lecture provides basic insights into process technology for producing integrated semiconductor components used in microelectronics. The primary focus lies on elucidating the specific procedural stages essential for chip manufacturing, including the materials and methods employed. Familiarity with the content covered in the "Fundamentals of Semiconductor Devices (Basic Studies)" lecture is advantageous as it serves as a foundational knowledge base. Consequently, this lecture forms the groundwork for the "Technology of Integrated Devices" course offered in the summer semester, which delves into the interplay among the various stages in chip fabrication. Continuing courses in this field are "Bipolar Devices," "MOS-Transistors and Memories," and the advanced "Semiconductor Technology Lab Class".

 

[Translate to English:] TEM Querschnittsaufnahme einer resonanten Tunneldiode [Translate to English:] TEM Querschnittsaufnahme einer resonanten Tunneldiode [Translate to English:] TEM Querschnittsaufnahme einer resonanten Tunneldiode © MBE 2020

Content

  • Technology trends, process flows
  • Wafer manufacturing
  • Doping, diffusion, furnace processes
  • Ion implantation
  • Thermal oxidation
  • Layer fabrication with atomic layer accuracy
  • Pattern transfer (lithography)
  • Back-end-of-line (contacting, wiring, planarization)
  • Wet chemistry
  • Etching
  • in line metrology
  • Analytics
  • Packaging (testing, dividing, bonding, enclosing)

Dates and Materials

Lecture start: 12.10.2023

Time: 09:15 - 10:45

Room 3702-031 e-Classroom eNIFE

Start practical exercises: 01.11.2023 (every 14 days)

Time: 08:45 - 10:15

Room 3702-031 e-Classroom eNIFE

Exam dates winter semester 2023

The exam Semiconductor Technology will take place this semester as an online exam in the E-Prüfungsilias (https://epruefungen.uni-hannover.de). The access data will be provided in the Stud.IP lecture during the semester as an announcement shortly before the exam.


In order to be able to take the exam, you must register for it online at the examination office. Please note the registration period, which is binding for your study program. Subsequent registrations are not possible.

Documents and supplemental materials are available on Stud.IP

Contact Us

Lecture

Dr.-Ing. Jan Krügener
Research Staff
chief engineer
Address
Schneiderberg 32
30167 Hannover
Building
Room
140
Address
Schneiderberg 32
30167 Hannover
Building
Room
140

Practical

Hannah Naomi Genath, M. Sc.
Research Staff