Lab Class Semiconductor Technology (winter semester 2024/2025)

The laboratory course will be offered during the winter semester of 2024/25. In this lab, participants will gain comprehensive insights into all process steps involved in manufacturing an integrated circuit, and they will actively engage in executing these steps. The semiconductor devices crafted by the participants will undergo electrical characterization. A prerequisite for enrolling in this lab is a solid understanding of the content covered in the "Semiconductor Technologies" and "Fundamentals of Semiconductor Devices" lectures. Proficiency in this knowledge will be assessed through a written test at the commencement of the lab.

 

[Translate to English:] Blick in den Gleblichtbereich eines Reinraums [Translate to English:] Blick in den Gleblichtbereich eines Reinraums [Translate to English:] Blick in den Gleblichtbereich eines Reinraums © LNQE 2015

Content

  • Wet chemical cleaning
  • Thermal oxidation
  • Photolithography
  • Ion implantation
  • Rapid thermal annealing (RTA)
  • Wet chemical structuring
  • Metallization
  • Electrical characterization

Schedule (Update 04.09.23)

This semester, there's a change in the procedure for lab admission. The lab admission test is scheduled for October 14th, 2024, at 9 am in room 031 in buildung 3702 (Schneiderberg 32). You can find all the essential details needed for the test in the lab class script, accessible in the Stud.IP event for the lab class under "Files". Additional information about the lab process is provided in the information presentation, also available on Stud.IP.

The examination will encompass questions related to the semiconductor lab. To qualify for lab class admission, you have to correctly answer at least half of the questions. In case more people meet this criterion than places are available, priority will be given to those with the highest scores.

If you have any questions about the exam, please don't hesitate to contact me in advance.

Further details about the actual lab procedures will be disclosed during an information session scheduled for December.

 

Orientation Meeting

There will be an orientation meeting for the Semiconductor Technologies Lab Class. The date will be announced here at the beginning of the semester.


Contact Us

Lecturer

J. Krügener
Dr.-Ing.
J. Krügener
Dr.-Ing.

Supervisor

J. Krügener
Dr.-Ing.
J. Krügener
Dr.-Ing.

Supervisor

O. Kerker
Dipl.-Ing.
O. Kerker
Dipl.-Ing.

Supervisor

H. Genath
M. Sc.
H. Genath
M. Sc.

Supplemental materials for the lab class and LNQE regulations are available on Stud.IP.